Available options
Gas injection system 3 or 5 port (for metal deposition and reactive etching)
EDX spectrometer
Mass filter
Alloys ion sources
Airlock
Motorized aperture changer
Automatic beam pattern designing and writing system (Elphy Quantum from Raith GmbH)
FIB 4000 series using tungsten or LaB6 electron columns
FIB 15000 series with high performance Field Emission columns.
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